The Axia ChemiSEM is a thermionic (tungsten-filament) SEM with a large chamber, variable pressure low-vacuum option, and retractable BSE and CL (cathodoluminescence) detectors. It also features an ‘always-on’ EDS data collection system for live quantitative elemental mapping.
Additional Features
- ThermoFisher integrated EDS with ColorSEM
- User Guidance automation
- Low vacuum mode up to 150 Pa with low-vac SE detector
- MAPS software for stitched imaging of large areas
- Large sample chamber