Focused Ion Beam Applications

An intensive five-day short course covering ion/solid interaction physics, prototyping, ex-situ and in-situ specimen preparation, Cryo-FIB, and 3D nanotomography.

📅 Session Dates: June 1–5, 2026
⏳ Duration: 5 Days (Full-Time)
📍 Location: Whitaker Laboratory & HST Building, Lehigh University

Course Structure & Textbook Reference

*All rooms are in Whitaker Lab unless specified otherwise.

Please note that all lectures are highlighted in boldface and labs are listed in normal font.

Monday, June 1 (Lectures are in boldface, lab titles in normal font)
TimeSession / TitleRoomLecturer
Morning Session
8:30-8:40Welcome303*Watanabe
8:45-10:00Lecture Introduction to Focused Ion Beams451Giannuzzi
10:00-10:20Break
10:20-12:00Lecture Physics of Ion/Solid Interactions451Michael
12:00Lunch
Afternoon Session
1:15-3:00Lab Lab 1: Software Simulations for Ion-Solid Interactions257Michael / Giannuzzi
3:00-3:30Break
3:30-5:00Lecture Imaging with Ions451Michael
5:15Dinner
Evening Session
6:15-7:15Lecture Micro and Nanofabrication: Milling and Deposition for Prototyping451Giannuzzi
7:15-7:30Break
7:30-9:30

Lab Lab 2: Introduction to FIB instruments, imaging with ions, optimizing deposition and milling strategies

Scios FIB/SEM
451 / 172BMichael / K. Scott / Wu (Thermo Fisher)
Tuesday, June 2 (Lectures are in boldface, lab titles in normal font)
TimeSession / TitleRoomLecturer
Morning Session
8:30-10:00Lecture SEM Sample Preparation for 2D Cross-Sectioning and 3D Tomography451K. Scott
10:00-10:15Break
10:15-12:00

Lab Lab 3: Sample preparation for 2D Imaging

Scios FIB/SEM
451 / 172BK. Scott / Giannuzzi / Wu (Thermo Fisher)
12:00Lunch
Afternoon Session
1:15-2:15Lecture Plasma Source FIB and Laser FIB Imaging451Michael
2:15-3:15

Lab Lab 4: Intro to PFIB

Amber X2 - remote
451Giannuzzi / Sharang (Tescan USA)
3:15-3:30Break
3:30-5:15

Lab Lab 5: 3D FIB SEM acquisition methods

Helios PFIB
451Rick Passey - TFS (with Giannuzzi / K. Scott / Michael)
5:15Dinner
Evening Session
6:30-7:00Lab Lab 6: Laser Demo (Remote)451Giannuzzi / N. May (Tescan USA)
7:00-8:00Lecture Segmenting 3D Data Sets451K. Scott
8:30-8:45Lecture Ion Implantation Damage and Redeposition During Ion Milling451Giannuzzi
8:45-9:30

Lab Lab 7: Student Guided Group Lab

Scios FIB/SEM
451 / 172BWu (Thermo Fisher)
Wednesday, June 3 (Lectures are in boldface, lab titles in normal font)
TimeSession / TitleRoomLecturer
Morning Session
8:30-10:15Lecture S/TEM and APT Specimen Preparation with FIB451Giannuzzi
10:15-10:30Break
10:30-12:00

Lab Lab 8: S/TEM Specimen Prep I – INLO specimen prep

Scios FIB/SEM and Helios PFIB
451 / 172BGiannuzzi / K. Scott / Michael / Wu / Passey / Campos / Tsekrekas
12:00Lunch
Afternoon Session
1:15-2:45

Lab Lab 9: S/TEM Specimen Prep II – Low Energy Polishing and APT prep

Scios FIB/SEM and Helios PFIB
451 / 172BGiannuzzi / K. Scott / Michael / Wu / Passey / Campos / Tsekrekas
2:45-3:00Break
3:00-5:00

Lab Lab 10: S/TEM Specimen Prep III – EXLO specimen prep

Scios FIB/SEM and Helios PFIB
451 / 172BGiannuzzi / K. Scott / Michael / Passey / Campos / Tsekrekas
Evening Events
EveningBuses pick up in front of Whitaker lab building starting from 5:15 - 5:45 pm
6:00Cocktail HourHotel Bethlehem
7:00Course BanquetHotel Bethlehem
Thursday, June 4 (Lectures are in boldface, lab titles in normal font)
TimeSession / TitleRoomLecturer
Morning Session
8:30-10:15Lecture Organic Materials and Cryo-FIB Applications451K. Scott
10:15-10:30Break
10:30-12:00

Lab Lab 11: ex situ Lift Out

Tescan EXLO (remote)
451Giannuzzi (TESCAN USA) / K. Scott
12:00Lunch
Afternoon Session
1:15-3:00Lecture 3D FIB/SEM for Biological Samples451K. Scott
3:00-3:30Break
3:30-4:15Lecture Cryo-FIB/PFIB/STEM Specimen Preparation451Giannuzzi
4:15-4:45Lecture FIB-SIMS/RAMAN451Giannuzzi
5:15Dinner
Evening Session
6:30-9:30Lecture Quantitative 3D imaging with FIBSEM Nanotomography119K. Scott
Friday, June 5 (Lectures are in boldface, lab titles in normal font)
TimeSession / TitleRoomLecturer
Morning Session
8:30-9:15Lecture Post-FIB Cleaning of TEM Specimens451Bonifacio (Fischione)
9:15-9:45Lecture Selecting FIB Tools and Wrap-Up Q&A451K. Scott
9:45-10:00Break
10:00-11:00
Lab Lab 12: Nanomill Lab demo
Lab Lab 13: Student Samples and Hands-On Lab (Scios FIB SEM)
153

172B
Bonifacio (Fischione)

Wu (Thermo Fisher)
11:00-12:00
Lab Lab 12: Nanomill Lab demo
Lab Lab 13: Student Samples and Hands-On Lab (Scios FIB SEM)
153

172B
Bonifacio (Fischione)

Wu (Thermo Fisher)
12:00Lunch (box lunches – Whitaker Lobby)Whitaker Lobby